99.999% ultra-high purity nitrogen (5N grade) is a high-precision industrial gas widely used in semiconductor manufacturing, optical fiber production, pharmaceutical lyophilization, high-end laboratory analysis and aerospace precision testing. Ordinary PSA nitrogen generators can only achieve a purity of 99.9% at most, and must be equipped with a professional purification device to realize ultra-high purity nitrogen output. The ultra-high purity nitrogen purification system is a multi-stage composite purification structure based on primary nitrogen production equipment, which deeply removes trace oxygen, water vapor, carbon dioxide and organic impurities in crude nitrogen to make the nitrogen purity stably reach 99.999% and meet high-standard industrial and scientific research application requirements.

The core configuration of the 5N ultra-high purity nitrogen purification device includes three key units: deoxidation unit, dehydration and impurity removal unit, and fine filtration unit. The deoxidation unit adopts high-efficiency catalytic deoxidation technology, using palladium catalyst to carry out redox reaction with trace oxygen and residual hydrogen in crude nitrogen, converting oxygen into water to eliminate oxygen impurities that affect nitrogen purity. The catalyst has high catalytic activity and long service life, and can maintain stable deoxidation efficiency under continuous operation. The dehydration unit uses high-efficiency molecular sieve adsorption and freeze drying technology to deeply remove water vapor in nitrogen, controlling the dew point temperature of nitrogen below -70℃ and avoiding trace moisture residue. The fine filtration unit is equipped with multi-stage high-precision filter elements with a filtration accuracy of 0.01μm, which completely removes tiny solid particles and residual organic impurities in the gas.

In addition to the core purification units, the ultra-high purity nitrogen system is also equipped with intelligent monitoring and safety protection configurations. A high-precision online nitrogen purity analyzer is installed at the gas outlet to monitor the gas purity, dew point and oxygen content in real time. Once the purity is lower than the standard, the system will automatically alarm and trigger the purification system to enhance operation. The whole purification process adopts full-automatic closed-loop control, without manual intervention, ensuring the stability and consistency of gas quality. All pipeline accessories are made of 316L stainless steel with ultra-clean polishing treatment to prevent pipeline oxidation and secondary pollution. The matched purification device can stably support long-term continuous operation of ultra-high purity nitrogen equipment, with a purity fluctuation range less than 0.001%, which fully meets the strict gas quality standards of high-end precision manufacturing and scientific research experiments.